AggieFab Nanofabrication Facility

Overview of Services

The AggieFab Nanofabrication Facility (AggieFab) is a shared nano/microfabrication facility that recently moved to the 1st floor of the Frederick E. Giesecke Engineering Research Building at Texas A&M University. The facility has over 6,500 sq. ft. of class 100/1000 cleanroom space with raised access floors and vertical laminar flow. There is an additional 4,500 sq. ft. of support space, totaling 11,000 sq. ft. The facility and equipment have been developed over the past 20 years by many faculty members in the Department of Electrical and Computer Engineering with support from the department and the College of Engineering. The recent move to the newly built GERB was enabled by a $12M investment from the Texas A&M Engineering Experiment Station (TEES) as well as additional support by the Department of Electrical and Computer Engineering. The facility has state-of-the-art equipment for a wide range of micro- and nano-scale fabrication of diverse materials. In addition, the facility recently (Fall 2017) acquired $5M of new nanopatterning and deposition instruments through donation from the Hewlett Packard Enterprise (HPE). These include a Zeiss Orion Helium Ion Microscope/Nanofab, an FEI Helios DualBeam Focused Ion Beam (FIB), an ASM Atomic Layer Deposition (ALD) tool, and a Clustex Multi-target deposition tool. The facility also has recently received $1.5M from the Texas A&M University Research Development Fund to purchase several new tools to improve micropatterning and advanced substrate development capabilities. The main supporters of the facility include the Department of Electrical and Computer Engineering, TEES, and the Office of the Vice Presiden for Research. Additional support is provided by from the Departments of Mechanical Engineering, Material Science and Engineering, Chemical Engineering, and Biomedical Engineering.

AggieFab has its roots in the fabrication facilities developed over the years within the Solid State Group of the Electrical and Computer Engineering Department and is dedicated to the memory of Henry F. Taylor. The facility is currently supported by major financial contributions from the Department of Electrical and Computer Engineering, Texas A&M Engineering Experiment Station (TEES), and Division of Research of the Texas A&M University.

Getting Started

**For TAMU individuals: First-time users should click "Register" in upper right.  Returning users will click "Sign In"

**For Non-TAMU individuals: Before you register, you must be assigned an External PO Number.

Leadership

Prof. Arum Han | Director, Professor
arum.han@ece.tamu.edu

Location and hours of operation

Links and Resources

1. AggieFab Nanofabrication Facility website

Contacts