AggieFab Nanofabrication Facility

Overview of Services

The AggieFab Nanofabrication Facility (AggieFab) is a shared nano/microfabrication facility that recently moved to the 1st floor of the Frederick E. Giesecke Engineering Research Building at Texas A&M University. The facility has over 6,500 sq. ft. of class 100/1000 cleanroom space with raised access floor and vertical laminar flow, and an additional 4,500 sq. ft. of support space, totaling 11,000 sq. ft. The facility and equipment have been built up over the past 20 years by many faculty in the Department of Electrical and Computer Engineering, with support from the department and the College of Engineering. The recent move to the newly built GERB was enabled by a $12M investment from the Texas A&M Engineering Experiment Station (TEES), as well as additional support by the Department of Electrical and Computer Engineering. The facility has state-of-the-art equipment for full ranges of micro and nano-scale fabrication on diverse materials. In addition, the facility recently (Fall 2017) acquired $5M worth of new nanopatterning and deposition instruments through donation from the Hewlett Packard Enterprise (HPE). These includes the Zeiss Orion HeliumIon Microscope/Nanofab, FEI Helios DualBeam Focused Ion Beam (FIB), ASM Atomic Layer Deposition (ALD) tool, and the Clustex Multi-target deposition tool. The facility also has recently received $1.5M from the Texas A&M University Research Development Fund to purchase several new tools to improve micropatterning and advanced substrate development capabilities. The main supporters of the facility are: the Department of Electrical and Computer Engineering, TEES, and the Office of the Vice Presiden for Research. Additional supports are received from the Departments of Mechanical Engineering, Material Science and Engineering, Chemical Engineering, and Biomedical Engineering.

AggieFab has its roots in the fabrication facilities developed over the years within the Solid State Group of the Electrical and Computer Engineering Department and is dedicated in memory of Henry F. Taylor. The facility is currently supported by major financial contributions from the Department of Electrical and Computer Engineering, Texas A&M Engineering Experiment Station (TEES), and Division of Research of the Texas A&M University.

Getting Started

**For TAMU individuals: First-time users should click "Register" in upper right.  Returning users will click "Sign In"

**For Non-TAMU individuals: Before you register, you must be assigned an External PO Number.


Prof. Arum Han | Director, Professor

Location and hours of operation

Hours   Location

Monday - Friday (normal business hour): 8 AM - 5 PM
Monday - Sunday (extended hours): 24hrs

  1617 Research Parkway
  College Station, TX 77843

Links and Resources

  1. AggieFab Nanofabrication Facility website


Name Role Phone Email Location
Dr. Arum Han
GERB 237
Larry Rehn
Technical Lab Manager
GERB 105
Chelsey Michalsky
Program Specialist II
GERB 104
Dr. Ming-Wei Lin
Associate Research Scientist
GERB 223
Don Marek
Technician III
GERB 127

Service list

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Clustex Target (17)